Package making – Methods – With adsorption or absorption of contents
Reexamination Certificate
2007-01-30
2007-01-30
Gerrity, Stephen F. (Department: 3721)
Package making
Methods
With adsorption or absorption of contents
C053S449000, C053S469000
Reexamination Certificate
active
10295595
ABSTRACT:
The present invention includes a packaged coated workpiece. The packaged coated workpiece has: (1) a workpiece coated with a resist film sensitive to optical radiation, particulates or chemical contaminants; (2) an inner barrier sealed to enclose the coated workpiece and optionally a first getter agent, to produce a sealed first enclosure; and (3) an outer barrier sealed to enclose the sealed first enclosure and optionally a second getter agent, provided that the packaged coated workpiece has at least one getter agent, to produce a packaged coated workpiece suitable for storage for a period of at least one week without substantial loss of sensitivity, resolution or performance. The present invention also includes a process for preparing a packaged coated workpiece and a method of increasing the storage time of a coated workpiece to at least one week without substantial loss of sensitivity, resolution or performance.
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Angelopoulos Marie
Huang Wu-Song
Kwong Ranee Wai-Ling
Magg Christopher Karl
Medeiros David Robert
Gerrity Stephen F.
Morris, Esq. Daniel P.
Ohlandt Greeley Ruggiero & Perle L.L.P.
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