Method of making a nonplanar buried-heterostructure distributed-

Details Method of making a nonplanar buried-heterostructure distributed- Method of making a nonplanar buried-heterostructure distributed-

1986-10-29

1987-10-27

Hearn, Brian E.

Fishing, trapping, and vermin destroying

372 96, 20419234, H01L 2166, H01L 21208, H01L 2136, H01S 319

Patent

active

047019956

ABSTRACT:
A buried-heterostructure distributed feedback laser is described, including a grating structure at a surface of a nonplanar cladding layer. The grating structure can be made by transfer of a pattern by ion milling, the pattern being defined in an ion-beam resist layer, e.g., by direct-writing electron-beam exposure. Low-threshold, high-power lasers are obtained with a commercially favorable yield.

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