Method of making a monolithic thin film resonator lattice filter

Details Method of making a monolithic thin film resonator lattice filter Method of making a monolithic thin film resonator lattice filter

1995-08-17

1997-12-02

Hall, Carl E.

Metal working

Piezoelectric device making

310312, 310324, 310334, 310366, 427100, H01L 4122

Patent

active

056922795

ABSTRACT:
A monolithic thin film resonator, lattice filter including spaced apart strips of a conductive film positioned on a substrate so as to define a first set of I/O terminals, a layer of piezoelectric material positioned on the conductive film, and spaced apart conductive strips of a conductive film positioned on the piezoelectric layer orthogonal to the first strips to form cross-over areas, each defining a thin film resonator and a second set of I/O terminals. A plurality of portions of a dielectric film are positioned on selected cross-over areas to mass load the thin film resonators so as to lower the resonant frequency.

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patent: 4456850 (1984-06-01), Inoue et al.
patent: 4547748 (1985-10-01), Ballato
patent: 4634917 (1987-01-01), Dvorsky et al.
patent: 4642508 (1987-02-01), Suzuki et al.

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