Method of making a micro-fluidic structure

Details Method of making a micro-fluidic structure Method of making a micro-fluidic structure

2006-05-24

2010-02-23

Fulk, Steven J (Department: 2891)

Semiconductor device manufacturing: process

Chemical etching

Liquid phase etching

C257S414000, C257SE21215

Reexamination Certificate

active

07666798

ABSTRACT:
A microfabricated structure and method of making that includes forming a first layer of material on a substrate, forming patterned sacrificial material having a predetermined shape on the first layer of material, and forming a second layer of material over the first layer and the patterned sacrificial material, which is then removed to form an encapsulated cavity. Ideally, the first and second layers are formed of the same type material. A structural support layer can be added to the second layer. Openings can be formed in the cavity, and the cavities can be layered side by side, vertically stacked with interconnections via the openings, and a combination of both can be used to construct stacked arrays with interconnections throughout.

REFERENCES:
patent: 6936494 (2005-08-01), Cheung
patent: 2002/0072243 (2002-06-01), Craighead et al.
patent: 2003/0183916 (2003-10-01), Heck et al.
patent: 2004/0110322 (2004-06-01), Hougham et al.
patent: 2005/0048688 (2005-03-01), Patel et al.
patent: 2007/0023851 (2007-02-01), Hartzell et al.

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