Method of making a metal plug

Details Method of making a metal plug Method of making a metal plug

1992-03-23

1994-12-20

Maples, John S.

Fishing, trapping, and vermin destroying

437192, 437195, 437981, H01L 21441

Patent

active

053745914

ABSTRACT:
A metal plug is formed in a connection hole such as a via hole or a contact hole to provide an interconnection between multilayer wires in a semiconductor integrated circuit. First, an adhesion layer is deposited on an insulating film, and an area of the adhesion layer is etched away isotropic etching through an opening in a resist mask, the area being larger than the opening in the resist mask. Thereafter, the insulating film is etched through the opening in the resist mask by anisotropic etching, forming a connection hole in the insulating film. Then, a metal layer such as a blanket tungsten layer is deposited on the adhesion layer and in the connection hole. The metal layer is etched back and the adhesion layer is etched away, leaving the metal layer as a metal plug in the connection hole.

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