Method of making a metal plug

Details Method of making a metal plug Method of making a metal plug

1992-03-27

1994-02-08

Quach, T. N.

Fishing, trapping, and vermin destroying

437190, 437195, 437947, 748DIG20, H01L 21283

Patent

active

052847993

ABSTRACT:
A metal plug is formed in a connection hole such as a via hole or a contact hole to provide an interconnection between multilayer wires in a semiconductor integrated circuit. First, a connection hole is formed in an insulating film, and an adhesion layer is deposited on the insulating film and in the connection hole. Then, a metal layer is deposited on the adhesion layer, and the metal layer and the adhesion layer are removed, leaving a portion of the metal layer as a metal plug in the connection hole. The metal plug includes a portion left on the insulating film in a size greater than the width of the connection hole. The connection hole may be a stepped connection hole or may have a tapered portion. The metal plug may be composed of first and second metal layers with or without the adhesion layer interposed between.

REFERENCES:
patent: 4753709 (1988-06-01), Welch et al.
patent: 4936950 (1990-06-01), Doan et al.
patent: 4981550 (1991-01-01), Huttemann et al.
patent: 4987099 (1991-01-01), Flanner
patent: 5000818 (1991-03-01), Thomas et al.
patent: 5008730 (1991-04-01), Huang et al.
patent: 5104826 (1992-04-01), Fujita et al.

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