Method of making a magnetic oxide film with high coercive force

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating

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340174TF, 360131, C23C 1500, B05D 512, G11B 2300

Patent

active

040038130

ABSTRACT:
A magnetic oxide film manufacturing method is disclosed which involves the steps of sputtering a target made of iron and aluminum to form a film of non-magnetic iron oxide (.alpha.-Fe.sub.2 O.sub.3) and reducing the film to obtain a magnetic oxide film. When a target made of iron and aluminum is employed, it is possible to obtain a high coercive force magnetic oxide film which is highly adhesive to a substrate, excellent in surface roughness and less than 0.3.mu.m in thickness. Accordingly, it is possible to obtain a magnetic disk of high magnetic recording density.

REFERENCES:
patent: 3438885 (1969-04-01), Lewis et al.
patent: 3650921 (1972-03-01), Peters et al.
patent: 3681227 (1972-08-01), Szupillo
patent: 3795542 (1974-03-01), Halaby et al.
patent: 3829372 (1974-08-01), Heller
patent: 3929604 (1975-12-01), Shirahata et al.

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