Method of making a lattice mismatched heterostructure optical wa

Details Method of making a lattice mismatched heterostructure optical wa Method of making a lattice mismatched heterostructure optical wa

1991-04-11

1994-10-11

Wilczewski, Mary

Fishing, trapping, and vermin destroying

437 83, 437 89, 437132, 257200, 372 45, 372 46, 372 48, 142DIG26, 142DIG72, 142DIG149, 142DIG152, 385130, 385132, H01L 2120

Patent

active

053547098

ABSTRACT:
The invention comprises processes and heterostructure products defining silicon on insulator waveguides (80, 88, 90, 106, 112, 120, 122) that are suitable for use with light in the 1.3, 1.6 .mu.m or greater wavelengths. Silicon is deposited on an insulator layer 12 on a crystalline substrate 10 and grown or regrown in crystalline form. The silicon is then etched or formed into a waveguide structures.

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