Method of making a hybrid micro-electromagnetic article of manuf

Details Method of making a hybrid micro-electromagnetic article of manuf Method of making a hybrid micro-electromagnetic article of manuf

1998-09-30

2000-01-25

Bowers, Charles

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

H01L 2100

Patent

active

060177705

ABSTRACT:
A method of making an article of manufacture comprising a hybrid silicon-based micro-electromagnetic light shutter includes providing a silicon body having a top surface with an arcuate groove formed on the top surface. A recess and a light aperture are formed in the top surface of the silicon body proximate to the arcuate groove. A shutter assemblage generally comprising metallic elements is provided with a rotatable shutter blade fixedly attached to a means for rotating. The means for rotating has a micro-magnetic element that interacts magnetically with an electromagnet for producing rotational movement. The shutter assemblage is arranged in the recess of the silicon body so that the means for rotating can be supported during rotation by the arcuate groove and be activated for rotational movement by the electromagnet.

REFERENCES:
patent: 5708893 (1998-01-01), Furlani et al.
patent: 5781331 (1998-07-01), Carr et al.
patent: 5791040 (1998-08-01), Furlani et al.
patent: 5796152 (1998-08-01), Carr et al.
patent: 5888445 (1998-06-01), Ghosh et al.

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