Method of making a getter structure

Details Method of making a getter structure Method of making a getter structure

2006-01-24

2006-01-24

Santiago, Mariceli (Department: 2879)

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

C313S553000

Reexamination Certificate

active

06988924

ABSTRACT:
A method of manufacturing a getter structure, including forming a support structure having a support perimeter, where the support structure is disposed over a substrate. In addition, the method includes forming a non-evaporable getter layer having an exposed surface area, where the non-evaporable getter layer is disposed over the support structure, and includes forming a vacuum gap between the substrate and the non-evaporable getter layer. The non-evaporable getter layer extends beyond the support perimeter of the support structure increasing the exposed surface area.

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