Plastic and nonmetallic article shaping or treating: processes – Gas or vapor deposition of article forming material onto...
Patent
1994-04-28
1996-04-16
King, Roy V.
Plastic and nonmetallic article shaping or treating: processes
Gas or vapor deposition of article forming material onto...
427249, 4272557, 427122, 427577, 423446, B29C 4142, C23C 1626
Patent
active
055079873
ABSTRACT:
A method for producing free-standing diamond film having a surface area of at least 1000 square millimeters includes the following steps: providing a substrate; depositing, on the substrate, by chemical vapor deposition, a first layer of diamond over a surface area of at least 1000 square millimeters, and to a first thickness, the first layer being deposited at a first deposition rate; depositing, on the first layer, a second layer of diamond, over a surface area of at least 1000 square millimeters, and to a second thickness, the second layer being deposited at a second deposition rate; and releasing the diamond from the substrate; the second deposition rate being as lest twice as high as the first deposition rate, and the first thickness being sufficiently thick to prevent the released diamond from bowing by more than a given distance.
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Abstract (Dialog) From Diamond Film Update of Jun. 16, 1994--"CVD Diamond Film Without Stress Cracks" (1 sheet).
King Roy V.
Novack Martin
Saint Gobain/Norton Industrial Ceramics Corp.
Ulbrich Volker R.
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