Plastic and nonmetallic article shaping or treating: processes – Optical article shaping or treating – Nonresinous material only
Reexamination Certificate
2007-04-17
2007-04-17
Hoffmann, John (Department: 1731)
Plastic and nonmetallic article shaping or treating: processes
Optical article shaping or treating
Nonresinous material only
C264S040100, C264S406000, C065S033300
Reexamination Certificate
active
10723372
ABSTRACT:
The method of making a high quality fluoride crystalline optical microlithography lens element blank includes crystallizing a fluoride crystalline member with dimension ≧200 mm from a melt, annealing the fluoride crystalline member and qualifying the resulting member for use as an optical microlithography lens element blank The fluoride crystalline optical lithography lens element blanks have multiple adjoining abutting crystalline subgrains with low boundary angles. The crystalline members made by the method are qualified for use as lens element blanks by a testing method including measuring their absorption spectra at 200 to 220 nm to determine absorbance at 205 nm and/or by making measurements of radiation diffracted by them.
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Mayolet Alexandre M.
Pell Michael A.
Hoffmann John
Schott AG
Striker Michael J.
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