Method of making a floating gate memory cell

Details Method of making a floating gate memory cell Method of making a floating gate memory cell

1986-04-15

1988-04-05

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 52, 437983, 437 69, 357 235, H01L 21283, H01L 21316

Patent

active

047359196

ABSTRACT:
A method of making a floating gate memory cell which relies on control gate to floating gate conduction to charge and discharge the floating gate. The gate oxide and inter-level dielectric thicknesses are independently controlled by using a mask which can compensate for the different substrate and floating gate oxidation rates.

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