Method of making a floating gate memory cell

Details Method of making a floating gate memory cell Method of making a floating gate memory cell

1986-04-15

1987-08-04

Ozaki, George T.

Fishing, trapping, and vermin destroying

437 52, 437225, H01L 21441, H01L 21425

Patent

active

046836403

ABSTRACT:
A method of making a floating gate memory cell wherein the capacitance between the control gate and floating gate can be independently controlled. Independent capacitance control is achieved by forming the inter-level dielectric in a step which is independent of the gate oxide growth process.

REFERENCES:
patent: 4162504 (1979-07-01), Hsu
patent: 4426764 (1984-01-01), Kosa et al.
patent: 4488931 (1984-12-01), Pansana
patent: 4494301 (1985-01-01), Faraone
patent: 4495693 (1985-01-01), Iwahashi et al.
patent: 4519849 (1985-05-01), Korsh et al.

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