Fishing – trapping – and vermin destroying
Patent
1993-12-10
1994-12-27
Fourson, George
Fishing, trapping, and vermin destroying
437 43, 437 52, 437923, H01L 21265
Patent
active
053765737
ABSTRACT:
A flash EPROM device is provided for programmably storing digital data within a core array of electrically programmable transistors. A row or column within the array can be substituted for a spare or redundant row or column selectively connected to row or column decoder circuits by a redundancy select transistor. Self-aligned source regions within the array and redundancy select area are provided using a single mask for opening the self-aligned source regions and for implanting a light dosage of phosphorus directly into the underlying silicon substrate. Careful control and elimination of residue within the etched area via a subsequent wet etch helps ensure the implant edges are anisotropically controlled and isolated for subsequent lateral diffusion/drive-in. Accordingly, the flash EPROM device of a plurality of transistors within the array and within the redundancy select area are process controlled and demonstrate a significant reduction in threshold skewing. A result being an array of electrically programmable transistors which read, write and erase at substantially the same threshold level for each transistor.
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Garg Shyam G.
Richart Robert B.
Wang Fei
Advanced Micro Devices , Inc.
Booth Richard A.
Daffer Kevin L.
Fourson George
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