Method of making a field emission electron source with random mi

Details Method of making a field emission electron source with random mi Method of making a field emission electron source with random mi

1995-04-24

1997-05-13

Bradley, P. Austin

Electric lamp or space discharge component or device manufacturi

Process

With testing or adjusting

445 50, 445 60, 20419211, 20419234, 20429804, 20429836, H01J 130, H01J 942, H01J 902

Patent

active

056286597

ABSTRACT:
A system and method is available for fabricating a field emitter device, where in an emitter material, such as copper, is deposited over a resistive layer which has been deposited upon a substrate. Two ion beam sources are utilized. The first ion beam source is directed at a target material, such as molybdenum, for sputtering molybdenum onto the emitter material. The second ion beam source is utilized to etch the emitter material to produce cones or micro-tips. A low work function material, such as amorphous diamond, is then deposited over the micro-tips.

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