Method of making a field effect transistor

Semiconductor device manufacturing: process – Having organic semiconductive component

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438149, 438151, 257 40, 257 72, H01L 21335

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active

060603380

ABSTRACT:
A method of fabricating a field effect transistor including forming a gate electrode on an electrically insulating substrate; forming an electrically insulating film on the substrate covering the gate electrode; forming source and drain electrodes on the electrically insulating film on opposite sides of the gate electrode; forming a semiconducting film of a .pi.-conjugated polymer on the source and drain electrodes and on the electrically insulating film between the source and drain electrodes.

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