Semiconductor device manufacturing: process – Having organic semiconductive component
Patent
1999-01-12
2000-05-09
Bowers, Charles
Semiconductor device manufacturing: process
Having organic semiconductive component
438149, 438151, 257 40, 257 72, H01L 21335
Patent
active
060603380
ABSTRACT:
A method of fabricating a field effect transistor including forming a gate electrode on an electrically insulating substrate; forming an electrically insulating film on the substrate covering the gate electrode; forming source and drain electrodes on the electrically insulating film on opposite sides of the gate electrode; forming a semiconducting film of a .pi.-conjugated polymer on the source and drain electrodes and on the electrically insulating film between the source and drain electrodes.
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Doi Syuji
Fuchigami Hiroyuki
Koezuka Hiroshi
Tanaka Toshihiko
Tsumura Akira
Bowers Charles
Christianson K
Mitsubishi Denki & Kabushiki Kaisha
Sumitomo Chemical Company Limited
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