Method of making a carrier for at least one wafer

Details Method of making a carrier for at least one wafer Method of making a carrier for at least one wafer

1998-08-03

2000-07-11

Kramer, Dean J.

Handling: hand and hoist-line implements

Article carrier gripped and carried by hand

Having plural discrete receivers or supports for spaced...

118500, 118728, 206710, 211 41, B65D 8586

Patent

active

060861274

ABSTRACT:
A method of making a wafer carrier for use in the transportation and storage of semiconductor wafers includes providing a unitary frame, forming a corrosion resistant coating, such as a fluoropolymer, covering the frame and providing wafer support elements mounted on the frame. A wafer carrier made by the present method may include a unitary frame having several wafer supports joined by connecting members. The frame is coated with a material, such as a fluoropolymer, which is resistant to corrosive materials typically used in semiconductor fabrication processes.

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