Method of making a bistable micromagnetic light modulator

Optical: systems and elements – Optical modulator – Light wave temporal modulation

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359298, 359572, 359573, 359578, 359579, G02B 518, G02B 2608

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061411396

ABSTRACT:
A method of fabricating a modulator for modulating an incident beam of light includes a substrate having a cavity formed therein and a plurality of spaced-apart deformable elements formed in the cavity. The deformable elements each has a base layer, a poled magnetic layer formed in the base layer and a first light reflection layer deposited on the magnetic layer for reflecting an incident beam of light. Between adjacent deformable elements on the base of the cavity is arranged a second light reflection layer. A conductive element formed in the substrate electro-magnetically energizes the deformable elements to deflect in the cavity. Incident light passing through each one of the first light reflection layers is caused to destructively interfere with light reflected from the second light reflection layers thereby causing modulation of the incident light.

REFERENCES:
patent: 5311360 (1994-05-01), Bloom et al.
patent: 5677783 (1997-10-01), Bloom et al.
patent: 5991079 (1999-11-01), Furlani et al.
R. H. Victora, C. F. Brucker, and F. E. Spada, Journal of Magnetism and Magnetic Materials 97 (1991), pp. 343-352.

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