Method of making (100) NMOS and (110) PMOS sidewall surface...

Active solid-state devices (e.g. – transistors – solid-state diode – Regenerative type switching device – Bidirectional rectifier with control electrode

Reexamination Certificate

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Details

C257S068000, C257S288000, C257S900000, C257SE29264

Reexamination Certificate

active

07897994

ABSTRACT:
A method of forming an integrated circuit device that includes a plurality of MuGFETs is disclosed. A PMOS fin of a MuGFET is formed on a substrate. The PMOS fin includes a channel of a first surface of a first crystal orientation. A NMOS fin of another MuGFET is formed on the substrate. The NMOS fin includes a channel on the substrate at one of 0° and 90° to the PMOS fin and includes a second surface of a second crystal orientation.

REFERENCES:
patent: 2007/0052027 (2007-03-01), Ke et al.
patent: 2008/0079003 (2008-04-01), Shaheen et al.

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