Method of machining glass

Details Method of machining glass Method of machining glass

2005-04-12

2005-04-12

Stein, Stephen (Department: 1775)

Stock material or miscellaneous articles

All metal or with adjacent metals

Composite; i.e., plural, adjacent, spatially distinct metal...

C428S666000, C428S672000, C428S195100, C428S426000, C428S432000, C428S433000

Reexamination Certificate

active

06878463

ABSTRACT:
A low cost, durable mask for use in structuring anodically bondable glass materials and other structurable glass materials.

REFERENCES:
patent: 4902607 (1990-02-01), Lee
patent: 4983250 (1991-01-01), Pan
patent: 5569569 (1996-10-01), Goto et al.
patent: 6497995 (2002-12-01), Skrobis
patent: 6762126 (2004-07-01), Cho et al.
Corman, Enoksson and Stemme, Deep Wet Etching of Borosilicate Glass Using an Anodically Bonded Silicon Substrate as Mask, Journal of Micromaching and Microengineering, vol. 8 (1998) pp. 84-87.
A new fabrication method for borosilicate glass capillary tubes with lateral inlets and outlets M.-A. Grétillat *, F. Paoletti, P. Thiébaud, S. Roth, M. Koudelka-Hep, N.F. de Rooij Sensors and Actuators A 60 (1997) 219-222, no month.

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