Method of low temperature imprinting process with high...

Details Method of low temperature imprinting process with high... Method of low temperature imprinting process with high...

2011-03-08

2011-03-08

Wollschlager, Jeffrey (Department: 1742)

Plastic and nonmetallic article shaping or treating: processes

Mechanical shaping or molding to form or reform shaped article

Forming plural articles

C264S139000, C264S162000, C264S250000, C264S259000, C264S264000, C264S293000, C264S319000, C264S320000, C264S337000, C264S338000, C977S887000

Reexamination Certificate

active

07901607

ABSTRACT:
The present invention is directed to novel methods of imprinting substrate-supported or freestanding structures at low cost, with high pattern transfer yield, and using low processing temperature. Such methods overcome many of the above-described limitations of the prior art. Generally, such methods of the present invention employ a sacrificial layer of film.

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patent: WO03096123 (2003-11-01), None
Kong et al., Duo-mold imprinting of three-dimensional polymeric structures, Dec. 2004, J. Vac. Sci. Technology B 22(6), pp. 3251-3256.

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