Material or article handling – Apparatus for moving intersupporting articles into – within,... – Stack forming apparatus
Patent
1985-04-03
1987-01-13
Spar, Robert J.
Material or article handling
Apparatus for moving intersupporting articles into, within,...
Stack forming apparatus
414182, 414183, B65G 2500
Patent
active
046361405
ABSTRACT:
A soft landing cantilever boat loader for loading semiconductor wafer carrying boats into a furnace process tube includes a loading station having one or more loading assemblies, an automatically controlled door associated with each loading assembly for selectively closing an end of the process tube and a microcomputer based control system for controlling and coordinating process operations. The loading assemblies are of a low profile configuration and each include a boat supporting, cantilevered paddle that is mounted by a quick release mechanism on a carriage which is driven along ways by a motor. A motor speed control circuit provides closed loop motor speed using a pulse width modulated motor drive. A door operating mechanism provides movement of the door along two transverse axes to assure tight sealing of the door against the tube. The control system employs a self-teaching technique that permits rapid reprogramming of the carriage travel limits which may be required when the paddle is replaced by a paddle of a different type or length.
REFERENCES:
patent: 3958740 (1976-05-01), Dixon
patent: 4008815 (1977-02-01), Fisk
patent: 4362977 (1982-12-01), Evans et al.
patent: 4420812 (1983-12-01), Ito et al.
patent: 4440538 (1984-04-01), Bowers
patent: 4468195 (1984-08-01), Sasaki et al.
"Industrial Robots: Getting Smarter All the Time" by Rich Merritt; Instruments & Control Systems, Jul. 1982.
Aldridge Robert E.
Elloway Russell
Fritz William O.
Goff Ralph D.
Herrera Michael J.
Millman Stuart J.
Spar Robert J.
Thermco Systems, Inc.
Valentine James C.
Williamson John K.
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