Method of liquid treatment of micro-structures comprising struct

Details Method of liquid treatment of micro-structures comprising struct Method of liquid treatment of micro-structures comprising struct

1993-06-29

1997-07-29

Niebling, John

Fishing, trapping, and vermin destroying

437919, 216 6, H01L 2170

Patent

active

056521677

ABSTRACT:
Micro-structures comprising at least a structural member, which is liable to be bent under an external force and formed so as to leave a space between the member and another member liable to be bent and/or other rigid component, are successfully treated using a treating liquid, without suffering permanent deformation resulting from the use of the treating liquid, by removing the micro-structures from the liquid to an environment having a pressure less than the atmospheric pressure; or displacing the micro-structures from the treating liquid to another treating liquid having a smaller surface tension than that of the former liquid, and then removing the micro-structures from the latter liquid; or drying the micro-structures removed from the treating liquid by exposing the same to vapor of a liquid having a smaller surface tension than that of the treating liquid; or removing the micro-structures from the treating liquid to the atmosphere, and drying them using an energy beam of high intensity or an ultrasonic wave. Micro-structures are also disclosed which comprise at least a member liable to be bent but are capable of avoiding permanent deformation of the member resulting from a treatment using a liquid.

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S. Wolf, "Silicon Processing For The VLSI Era", vol. 2, Lattice Press, 1991, pp. 214-215.
Stemme, Goran, "Resonant silicon sensors," J. Micromech. Microeng, vol. 1 (1991), pp. 113-125.

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