Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal
Patent
1980-02-19
1981-04-21
Ozaki, G.
Metal treatment
Process of modifying or maintaining internal physical...
Chemical-heat removing or burning of metal
148172, H01L 21208
Patent
active
042630649
ABSTRACT:
An improved method of liquid phase epitaxial growth of III-V compound on an nP substrate by growing the epitaxial layer in an atmosphere of H.sub.2 with 10.sup.-5 to 10.sup.-4 mole fraction PH.sub.3.
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patent: 4072544 (1978-02-01), DeWinter et al.
patent: 4142924 (1979-03-01), Hsieh
Clawson Arthur R.
Lum Wing Y.
McWilliams Gerald E.
Johnston Ervin F.
Keough Thomas Glenn
Ozaki G.
Sciascia Richard S.
The United States of America as represented by the Secretary of
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