Method of linearizing a flow velocity sensor, a linearized flow

Details Method of linearizing a flow velocity sensor, a linearized flow Method of linearizing a flow velocity sensor, a linearized flow

1995-12-21

1998-05-12

Chilcot, Richard

Measuring and testing

Volume or rate of flow

Using differential pressure

G01F 138

Patent

active

057509034

ABSTRACT:
The invention relates to a method and apparatus for linearizing a flow velocity sensor based on pressure difference measurement. According to the method, a difference of two pressure signals is measured from the flow under measurement and is proportional to the square of the flow velocity. The pressure difference is measured using a micromechanically manufactured symmetrical capacitive differential pressure sensor based on the force balance principle. The pressure-induced deviation from force balance is compensated for by inducing on the pressure-sensing diaphragm of the differential pressure sensor a force-balance-restoring electrostatic pressure. The amplitude of the force-balance-restoring electrical feedback control signal also acts as the system output signal and is directly proportional to the square root of the difference of the two pressure signals, and thus, a linear function of the flow velocity. According to the invention, the feedback control voltage is a function of the direction of the pressure difference and is applied only to one of the stationary electrodes so that the electrostatic force of attraction thus induced acts counter to the force generated by the pressure difference under measurement, whereby the polarity of the system output voltage signal is dependent on the direction of the flow.

REFERENCES:
patent: 4987782 (1991-01-01), Shkedi et al.
patent: 5083091 (1992-01-01), Frick et al.
patent: 5194819 (1993-03-01), Briefer
patent: 5470797 (1995-11-01), Mastrangelo
patent: 5515732 (1996-05-01), Willcox et al.

Affiliated with

Also associated with

Rating

Method of linearizing a flow velocity sensor, a linearized flow does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of linearizing a flow velocity sensor, a linearized flow , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of linearizing a flow velocity sensor, a linearized flow will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-982084