Electric heating – Metal heating – By arc
Patent
1991-06-03
1994-05-10
Evans, Geoffrey S.
Electric heating
Metal heating
By arc
B23K 2612
Patent
active
053109902
ABSTRACT:
Processing methods transform ferroelectric precursor films into a desired crystalline structure without adversely heating nearby materials and circuitry such as those found associated with lead zirconate titanate films. The thin film sample is placed within an appropriate chamber, where a suitable ambient is in contact with the thin film sample. The ambient may be air, oxygen or any other ambient which is known in the art to be appropriate for annealing ferroelectric materials. In this regard annealing in air can done without the processing chamber. The process for annealing relies upon continuous wave (CW) laser annealing, pulse UV annealing with or without a laser and various combinations of thermal pretreatment and processing to allow solid state diffusion in accordance with parameters appropriate for a particular application. Methods of laser patterning thin film ferroelectrics without adversely damaging adjacent or underlying layers, e.g. electrodes, are also disclosed.
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Russell Stephen D.
Sexton Douglas A.
Evans Geoffrey S.
Fendelman Harvey
Keough Thomas Glenn
The United Stated of America as represented by the Secretary of
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