Method of laser connection of a conductor to a doped region of t

Fishing – trapping – and vermin destroying

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437 19, 437174, 437193, 437194, 437202, 437908, 148DIG93, H01L 2126

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active

052310507

ABSTRACT:
The conductor 15 to be connected to the doped region 12 of the substrate 11 has an edge 15a at which the laser beam 20 is aimed, regulated such as to definitively create a zone of low electrical resistance 19 in the dielectric layer 13 that separates the conductor from the doped region. The invention is particularly applicable to programming by laser of read only memories and defective integrated circuits with a view to correcting them.

REFERENCES:
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patent: 4240094 (1980-12-01), Mader
patent: 4387503 (1983-06-01), Asuell
patent: 4665295 (1987-05-01), McDavid
patent: 4751197 (1988-06-01), Wills
patent: 4783424 (1988-11-01), Ohno
Cook et al., "Connections and Disconnections on Integrated Circuits Using Nanosecond Laser Pulses", Appl. Phys. Lett., vol. 26, No. 3, Feb. 1975, pp. 124-126.
Chaudari et al; "Bonding Wires To Microcircuitry" IBM Technical Discl. Bull; Nov. 1978.
Smith et al; "Laser Induced Personalization & Alterations Of LSI & VLSI Circuits"; Proceedings--Laser Processing Conference Nov. 16-17, 1981.
d'Heurle et al; "Lowering The Laser Formed Contact Resistance Between Al and Si" IBM Technical Discl. Bull; Jun. 1974.
Wu, Wei-Wha; "Automated Welding Customizes Programmable Logic Arrays" Jul. 1982; Electronics Int'l, vol. 55, No. 14, pp. 159-162.

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