Method of laser-assisted fabrication of optoelectronic and...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having growth from a solution comprising a solvent which is...

Reexamination Certificate

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C117S069000, C117S084000, C117S058000, C117S092000, C117S944000

Reexamination Certificate

active

06869479

ABSTRACT:
The present invention provides a method for fabrication of integrated optical structures and micro-lenses on different substrates based on new process of laser-assisted deposition of optical materials on various crystalline or amorphous solid-state materials. The deposition of target material takes place as a result of interaction of the laser beam with the substrate surface being in direct contact with a liquid containing precursor of appropriate target material. In one preferred embodiment, the micro-lens is fabricated directly on optical fibers or light emitting devices providing improved light collimation as required for efficient laser-to-fiber pig tailing. In another preferred embodiment, the micro-lenses are fabricated on each active element of a laser diode array. The method can be used in all applications where controllable deposition of inorganic or organic materials on a solid state substrate is required, including chemical vapor deposition of thin films, fabrication of integrated optical, fiber-optical and micro-optical components for optoelectronic and photonic devices.

REFERENCES:
patent: 6068800 (2000-05-01), Singh et al.
patent: 2000-026120 (2000-01-01), None
patent: 2000256863 (2000-09-01), None
patent: 2000282244 (2000-10-01), None
patent: WO-9720846 (1997-06-01), None

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