Method of irradiating ultraviolet light onto an object

Details Method of irradiating ultraviolet light onto an object Method of irradiating ultraviolet light onto an object

2006-10-24

2006-10-24

Lee, John D. (Department: 2874)

Optical: systems and elements

Optical frequency converter

Harmonic generator

C359S326000, C359S341100, C372S005000, C372S022000

Reexamination Certificate

active

07126745

ABSTRACT:
A method of irradiating ultraviolet light onto an object. The method includes generating pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm from a laser generating portion, amplifying the pulse light plural times with an optical amplifier that includes a plurality of fiber optical amplifiers, wavelength-converting the amplified pulse light into ultraviolet light with a wavelength converting portion that includes a plurality of non-linear optical crystals, and irradiating the ultraviolet light onto the object through an optical system.

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