Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1985-08-27
1986-08-19
Newsome, John H.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
204165, 219121PL, B05D 108
Patent
active
046069291
ABSTRACT:
The disclosed method of ionized-plasma spraying includes the steps of loading an article to be coated into a vacuum chamber, pumping out active gases from the vacuum chamber to a pre-evacuation level, cutting off the pre-evacuation pump, leaking an inert gas into the vacuum chamber, pumping out active gases from the vacuum chamber to the working pressure, spraying a coating onto the article in an inert gas atmosphere, and after the application of the coating terminating the pumping out of active gases from the vacuum chamber and leaking air thereinto, the subsequent pumping out of air from the vacuum chamber being effected to a pressure of 6 to 66 Pa.
The apparatus for perfoming the method comprises a high evacuation unit including a magnetron pump connected with the vacuum chamber through a cutoff valve and associated with means for monitoring the residual atmosphere.
REFERENCES:
patent: 3961103 (1976-06-01), Aisenberg
patent: 4006340 (1977-02-01), Gorinas
patent: 4328257 (1982-05-01), Muehlberger et al.
patent: 4471003 (1984-09-01), Cann
patent: 4475032 (1984-10-01), Popma
patent: 4505945 (1985-03-01), Dubust et al.
"Elektronnaya Promyshlennost", magazine, 1980, No. 5, pp. 52-54, A. I. Belyakov, E. S. Privalov, A. A. Trunin, Apparatus for Deposition of Thin Layers of Aluminium and Its Alloys, (USSR and copy of English translation).
"Reviews of Electronics", Series: Technology and Management of Production and Plant, M. I. Berezin, Technology and Equipment for Applying Thin Films, Issue 9(30), Jun. 1972, SsNIIElektronika, Moscow, pp. 15-16, (USSR and copy of English translation).
"Elektronnaya Promyshlennost", (Electronics Industry Magazine), 1983, No. 5, N. S. Balakin, V. E. Minaichev, Oil-Free Cryogenic Pumping-Out System for Magnetron Spraying Unit, (USSR and copy of English translation).
Balykin Pavel S.
Barklon David I.
Domrachev Vladimir A.
Minkin Gennady P.
Petrakov Vladimir P.
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