Method of inspecting semiconductor integrated circuit which...

Details Method of inspecting semiconductor integrated circuit which... Method of inspecting semiconductor integrated circuit which...

2005-10-11

2005-10-11

Nguyen, Tu T. (Department: 2877)

Optics: measuring and testing

Shape or surface configuration

Triangulation

Reexamination Certificate

active

06954274

ABSTRACT:
A semiconductor integrated circuit inspecting apparatus inspecting a terminal provided on a mount surface of a semiconductor integrated circuit includes a light emitter, a photographing unit and an inspector. The light emitter emits a linear light obliquely to the mount surface. The photographing unit photographs the mount surface to which the light is emitted to output a photograph signal. The inspector inspects the terminal in accordance with the photograph signal. The photographing unit has N (N is a positive integer) photographing elements. The photograph signal is outputted respectively only from M (M is a positive integer smaller than the N) photographing elements of the N photographing elements.

REFERENCES:
patent: 5877859 (1999-03-01), Aspnes et al.
patent: 6154281 (2000-11-01), Sentoku et al.
patent: 6424418 (2002-07-01), Kawabata et al.
patent: 06-103171 (1994-12-01), None
patent: 10-209227 (1998-08-01), None
patent: 11-072316 (1999-03-01), None

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