Method of inspecting particles on semiconductor devices

Details Method of inspecting particles on semiconductor devices Method of inspecting particles on semiconductor devices

1994-11-04

1995-08-22

Limanek, Robert P.

Optics: measuring and testing

By particle light scattering

356237, G01B 902

Patent

active

054445299

ABSTRACT:
Liquid water drops are formed around particles situated on a substrate and diffuse laser light patterns are intensified by the liquid water drops to make it possible to detect minute particles of 0.1 .mu.m and less in dimension.

REFERENCES:
patent: 4073975 (1978-02-01), Buckwalter et al.
patent: 5061068 (1991-10-01), Menon

Affiliated with

Also associated with

Rating

Method of inspecting particles on semiconductor devices does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of inspecting particles on semiconductor devices, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of inspecting particles on semiconductor devices will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2145831