Method of inspecting a workpiece surface including a picturing s

Details Method of inspecting a workpiece surface including a picturing s Method of inspecting a workpiece surface including a picturing s

1994-11-17

1996-10-15

Boudreau, Leo

Image analysis

Applications

Surface texture or roughness measuring

382152, 348128, G06K 900

Patent

active

055662447

ABSTRACT:
A workpiece surface is measured to detect a defective portion with a projection and a depression on the workpiece surface by using an optical inspecting apparatus having a projector for radiating a detecting light towards the workpiece surface and a picturing device for receiving a reflected light from the workpiece surface. A reflected light from the workpiece surface is pictured in a condition in which a focal surface of the picturing device is positioned away from the workpiece surface to the side of the picturing device relative to an entire region of that effective inspecting range of the workpiece surface from which the picturing device can receive the reflected light. The defective portion on the workpiece surface is detected from a dark portion which appears on the image of the picturing device.

REFERENCES:
patent: 4863268 (1989-09-01), Clarke et al.
patent: 4868404 (1989-09-01), Hajime
patent: 4920572 (1990-04-01), Sugita et al.
patent: 4958223 (1990-09-01), Juvinall et al.
patent: 4974077 (1990-11-01), Kusaba
patent: 4975972 (1990-12-01), Bose et al.
patent: 4980923 (1990-12-01), Kawamoto et al.
patent: 5047858 (1991-09-01), Aimonoya
patent: 5155558 (1992-10-01), Tannenbaum et al.
patent: 5237404 (1993-08-01), Tanaka et al.

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