Method of inspecting a defect on a translucid film

Details Method of inspecting a defect on a translucid film Method of inspecting a defect on a translucid film

1998-03-20

1999-05-25

Kim, Robert

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

356 36, 3562374, 356382, G01N 2100

Patent

active

059073977

ABSTRACT:
A method of the invention for inspecting a defect on a translucid film is provided. The method includes an anti-reflective coating (ARC) layer over the translucid film. The anti-reflective coating (ARC) layer prevents inspecting light from penetrating through the ARC layer and reduces the amount of inspecting light refracting through the translucid film. The inspection is performed by generating an inspecting light with a predetermined angle radiating on the ARC layer. The reflecting light message from different regions of the anti-reflective coating (ARC) layer are separately collected. The reflecting light messages are compared die to die to calculate an inspecting result.

REFERENCES:
patent: 5569342 (1996-10-01), Gould et al.
patent: 5576831 (1996-11-01), Nikoondrud et al.
patent: 5742386 (1998-04-01), Nose et al.

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