Electric lamp and discharge devices – Fluent material supply or flow directing means
Reexamination Certificate
2007-05-08
2011-10-18
Williams, Joseph L (Department: 2889)
Electric lamp and discharge devices
Fluent material supply or flow directing means
C313S231310, C313S231410, C313S231510, C313S231610, C313S231710
Reexamination Certificate
active
08040030
ABSTRACT:
The present invention relates to a method of increasing the conversion efficiency of an EUV and/or soft X-ray lamp, in which a discharge plasma (8) emitting EUV radiation or soft X-rays is generated in a gaseous medium formed by an evaporated liquid material in a discharge space, said liquid material being provided on a surface in the discharge space and being at least partially evaporated by an energy beam (9). The invention also refers to a corresponding apparatus for producing EUV radiation and/or soft X-rays. In the method, a gas (11) composed of chemical elements having a lower mass number than chemical elements of the liquid material is supplied through at least one nozzle (10) in a directed manner to the discharge space and/or to the liquid material on a supply path to the discharge space in order to reduce the density of the evaporated liquid material in the discharge space. With the present method and corresponding apparatus the conversion efficiency of the lamp is increased.
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Jonkers Jeroen
Vaudrevange Dominik Marcel
Koninklijke Philips Electronics , N.V.
Lee Nathaniel
Williams Joseph L
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