Fishing – trapping – and vermin destroying
Patent
1994-07-05
1998-11-24
Kunemund, Robert
Fishing, trapping, and vermin destroying
437174, 148DIG93, 148DIG94, H01L 21265
Patent
active
058405925
ABSTRACT:
A method of simultaneously improving the spectral response and dark current characteristics of an image gathering detector is disclosed. The method uses an excimer laser to redistribute and activate ion implanted dopant species in the backside of an image gathering device such as a backside-illuminated CCD. Alternately, the excimer laser is used to incorporate dopants from a gaseous ambient into the backside of the image gathering device and simultaneously redistribute and activate the dopants. The redistribution of the dopant is controlled by the laser pulses and provides for a peak dopant concentration at the back surface of the image gathering device which provides for improved spectral response and simultaneously improves dark current characteristics.
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Kelley Eugene P.
Reedy Ronald E.
Russell Stephen D.
Sexton Douglas A.
Fendelman Harvey
Kagan Miachael A.
Keough Thomas Glenn
Kunemund Robert
The United States of America as represented by the Secretary of
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