Method of improving surface morphology of laser irradiated surfa

Details Method of improving surface morphology of laser irradiated surfa Method of improving surface morphology of laser irradiated surfa

1992-06-10

1993-08-03

Chaudhuri, Olik

Chemistry of inorganic compounds

Treating mixture to obtain metal containing compound

Alkaline earth metal

21912173, 437174, 437188, H01L 21268

Patent

active

052326748

ABSTRACT:
A method of improving surface morphology of a laser irradiated surface includes a first step of irradiating a pulse laser beam one or a plurality of times on a region of a conductor layer which is formed on an under layer so as to melt the entire conductor layer, and a second step of irradiating a pulse laser beam on the irradiated region of the conductor layer at least once after the first step with an energy density such that only a surface portion of the conductor layer melts in substantially the entire irradiated region.

REFERENCES:
patent: 4758533 (1988-07-01), Magee et al.
patent: 4800179 (1989-01-01), Mukai
patent: 4920070 (1990-04-01), Mukai
"Planarization Technique for Al Electrode Interconnection by Excimer Laser Light Irradiation", Mukai et al., Semiconductor World, Nov. 1988, pp. 83-89.

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