Method of improving field emission characteristics of diamond th

Details Method of improving field emission characteristics of diamond th Method of improving field emission characteristics of diamond th

1996-07-19

1999-05-11

Beck, Shrive

Coating processes

Coating by vapor, gas, or smoke

Carbon or carbide coating

427 77, 427 78, 427377, 4273984, C23C16/26

Patent

active

059026405

ABSTRACT:
A method of preparing diamond thin films with improved field emission properties. The method includes preparing a diamond thin film on a substrate, such as Mo, W, Si and Ni. An atmosphere of hydrogen (molecular or atomic) can be provided above the already deposited film to form absorbed hydrogen to reduce the work function and enhance field emission properties of the diamond film. In addition, hydrogen can be absorbed on intergranular surfaces to enhance electrical conductivity of the diamond film. The treated diamond film can be part of a microtip array in a flat panel display.

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Article "Effects of Potassium and Lithium Metal Deposition on the Emission Characteristics of Spindt-type Thin-film Field Emission Microcathode Arrays", Talin, A.A., T.E. Feller and D.J. Devine, J. Vac. Sci. Technol. B., vol. 13, No. 2 (Mar./Apr. 1995).
Article "Beyond AMLCDs: Field Emission Displays?", Derbyshire, K., Solid State Technology (Nov. 1994) pp. 55-65.

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