Fishing – trapping – and vermin destroying
Patent
1993-10-25
1995-07-04
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437 45, 437 48, H01L 2700, H01L 2170
Patent
active
054299756
ABSTRACT:
A ROM device with an array of cells and a method of manufacturing comprises: forming closely spaced conductors in the surface of a semiconductor substrate having a second type of background impurity. Insulation is formed on the substrate. Closely spaced, parallel, conductors on the insulation are arranged orthogonally to the line regions. Glass insulation is formed over the conductors. Reflowing the glass insulation, forming contacts and forming a metal layer on the glass insulation follow. A resist is formed, exposed forming a resist metal pattern, then etching through the resist to pattern metal and removing the resist. Depositing a resist onto the patterned metal, and exposing the second resist with a custom code pattern, developing the resist into a mask follow. Impurity ions are implanted into the substrate adjacent to the conductors through the openings in a second resist layer. The device is passivated followed by activating the implanted impurity ions by annealing the device at a temperature less than or equal to about 520.degree. C. in a forming gas or N.sub.2 atmosphere.
REFERENCES:
patent: 4356042 (1982-10-01), Gredaly et al.
patent: 5081052 (1992-01-01), Kobayashi et al.
Chung Chen-Hui
Hsue Chen-Chiu
Sheu Shing-Ren
Chaudhuri Olik
Jones, Jr. Graham S.
Saile George O.
Tsai H. Jey
United Microelectronics Corporation
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