Method of imaging using lithographic projection apparatus

Details Method of imaging using lithographic projection apparatus Method of imaging using lithographic projection apparatus

2007-04-03

2007-04-03

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S077000

Reexamination Certificate

active

11017197

ABSTRACT:
A method is provided for compensating for the effect of flare lithographic apparatus. The method includes establishing a power spectral density (PSD) indicative of the spatial frequency of the stray radiation produced by a projection system, and determining, from the PSD, a modulation transfer function (MTF) relating the PSD to a pattern applied by a patterning device to take the effect of flare on the pattern image into account. The MTF is then used to determine the effect of flare on a critical dimension (CD) of the pattern image, and a relationship is established between any change in the CD of the pattern image and a change in the CD of the pattern. The patterning device may then be designed in such a way as to at least partially offset the effect of flare on the CD of the pattern image.

REFERENCES:
patent: 6815129 (2004-11-01), Bjorkholm et al.
patent: 6898781 (2005-05-01), Singh et al.
patent: 6986973 (2006-01-01), Yao et al.
patent: 2003/0214642 (2003-11-01), Yang
patent: 2005/0257187 (2005-11-01), Gallatin et al.

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