Method of illuminating a photomask using chevron illumination

Details Method of illuminating a photomask using chevron illumination Method of illuminating a photomask using chevron illumination

2006-08-15

2006-08-15

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S067000, C430S005000

Reexamination Certificate

active

07092073

ABSTRACT:
A microlithograpic tool, such as a projection stepper, for manufacturing integrated circuits, shapes light that illuminates a photomask with a chevron illumination system. The system uses either a chevron aperture mask of diffractive optical elements to shape a light source into four chevrons (110b,120b,130b,140b). The chevrons are located in the corners of the circular pupil of the condenser lens. The chevrons may be a small a square poles at the corners or as large as an annular square ring. The chevrons provide superior performance for illuminating conventional X and Y oriented features of a photomask.

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