Method of identifying bottlenecks and improving throughput...

Details Method of identifying bottlenecks and improving throughput... Method of identifying bottlenecks and improving throughput...

2005-02-15

2005-02-15

Gandhi, Jayprakash N. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S117000, C700S121000, C438S005000, C209S552000

Reexamination Certificate

active

06856847

ABSTRACT:
Throughput in a semiconductor wafer processing system, such as in-line photolithography equipment, is improved by identifying and correcting bottlenecks in the flow of wafers through multiple, associative segments of the equipment. Segmental rather than total processing times are monitored in order to identify the segments having the longest processing times. The theory of constraints is applied to identify the process segment representing a bottleneck in the process, and effect improvements in the bottleneck segment that provide greater overall throughput.

REFERENCES:
patent: 6092000 (2000-07-01), Kuo et al.
patent: 6166801 (2000-12-01), Dishon et al.
patent: 6491451 (2002-12-01), Stanley et al.
patent: 6564113 (2003-05-01), Barto et al.
patent: 6622055 (2003-09-01), Fan et al.

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