Method of high pressure treatment

Details Method of high pressure treatment Method of high pressure treatment

2005-11-08

2005-11-08

Carrillo, Sharidan (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

Sequential work treating receptacles or stations with means...

C134S002000, C134S026000, C134S030000, C134S035000, C134S036000, C134S042000, C134S902000

Reexamination Certificate

active

06962161

ABSTRACT:
In a high pressure processing method for removing an unnecessary substrate on the surface of the surface of a workpiece by bringing it into contact with supercritical carbon dioxide and additives in a high-pressure chamber, removing the unnecessary substance on the workpiece, first rinsing and second rinsing are performed under a substantially same pressure with continuous flowing of supercritical carbon dioxide.

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