Method of heating a substrate in a variable temperature...

Details Method of heating a substrate in a variable temperature... Method of heating a substrate in a variable temperature...

2005-06-14

2005-06-14

Wilson, Gregory (Department: 3749)

Heating

Accessory means for holding, shielding or supporting work...

C219S444100, C118S725000, C432S005000

Reexamination Certificate

active

06905333

ABSTRACT:
A method is provided for heating a substrate in a process chamber using a heated chuck. In accordance with the method, the substrate is lowered onto the chuck and heated to a first temperature less than a temperature of the chuck. The substrate is then raised away from the chuck, and a process is carried out on the substrate while the substrate is supported above the chuck. The substrate is then lowered back to the chuck and heated to a second temperature greater than the first temperature for further processing of the substrate.

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