Heating – Processes of heating or heater operation – Including preparing or arranging work for heating
Patent
1989-03-09
1990-09-11
Yuen, Henry C.
Heating
Processes of heating or heater operation
Including preparing or arranging work for heating
432 6, 432123, 432253, F27D 300
Patent
active
049558080
ABSTRACT:
A method of heat-processing semiconductor wafers comprising forming a purge tube which encloses the plural wafers by supporting a boat, on which the plural wafers are mounted, by a carrier arm to define a space on the upper side of the wafers while defining another space on the lower side of the wafers when the boat is to be loaded into and unloaded from a heat process furnace by the moving carrier arm or either when the boat is to be loaded into the heat process furnace or when it is to be unloaded from the heat process furnace, moving the carrier arm to communicate the purge tube with the heat process furnace, supplying nitrogen gas into both of the purge tube and the heat process furnace, keeping them connected to each other, pre-heating or cooling the wafers to a predetermined temperature range, and loading the purge tube into the heat process furnace or unloading the purge tube from the heat process furnace.
REFERENCES:
patent: 4459104 (1984-07-01), Wollmann
patent: 4526534 (1984-07-01), Wollmann
patent: 4543059 (1985-09-01), Whang et al.
patent: 4610628 (1986-09-01), Mizushina
patent: 4651441 (1987-03-01), Daetwyler
Tel Sagami Limited
Yuen Henry C.
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