Method of growing electrical conductors

Details Method of growing electrical conductors Method of growing electrical conductors

2006-06-27

2006-06-27

Lebentritt, Michael (Department: 2812)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

C438S585000, C438S650000, C438S686000

Reexamination Certificate

active

07067407

ABSTRACT:
A method for forming a conductive thin film includes depositing a metal oxide thin film on a substrate by an atomic layer deposition (ALD) process. The method further includes at least partially reducing the metal oxide thin film by exposing the metal oxide thin film to a gaseous inorganic reducing agent, thereby forming a metal layer. In preferred arrangements, the reducing agent comprises of thermal hydrogen (H2), hydrogen radicals (H*) and/or carbon monoxide (CO).

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