Method of growing crystalline layers by vapor phase epitaxy

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148DIG48, 148DIG64, 148DIG94, 156613, 437173, 437 87, 437936, 437949, 437963, H01L 2120, H01L 2126

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049506218

ABSTRACT:
A method of growing an epitaxial crystalline layer on a substrate which comprises the steps of

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