Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating
Patent
1989-03-07
1990-12-25
Beck, Shrive
Coating processes
Coating by vapor, gas, or smoke
Carbon or carbide coating
4272552, 423440, C23C 1632
Patent
active
049802011
ABSTRACT:
The invention relates to a chemical vapor deposition (CVD) method for forming tungsten carbide, W.sub.3 C, by subjecting a gas mixture of tungsten hexafluoride, hydrogen and an aromatic hydrocarbon, e.g. benzene, to vapor phase reaction at an elevated temperature. The reaction temperature can be lowered to the extent of 250.degree. C. and the reaction can be carried out even at normal pressure, not necessarily under reduced pressure, by proportioning tungsten hexafluoride, hydrogen and the hydrocarbon such that in the gas mixture the atomic ratio of C to W falls in the range from 2 to 10 while the atomic ratio of H to C is not lower than 3. By this method a W.sub.3 C film excellent in glossiness can be deposited on various metal parts without adversely affecting the metal parts by the elevated temperature.
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Kita Yasushi
Tokunaga Nobuyuki
Beck Shrive
Bueker Margaret
Central Glass Company Limited
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