Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates
Reexamination Certificate
2011-07-26
2011-07-26
Kebede, Brook (Department: 2894)
Semiconductor device manufacturing: process
Bonding of plural semiconductor substrates
C438S459000, C257SE21122
Reexamination Certificate
active
07985658
ABSTRACT:
A method of fabricating a semiconductor substrate structure comprises forming an oxide region in contact with a first semiconductor, e.g. silicon, substrate, implanting P-type dopants into the first semiconductor substrate to form a P-doped region, bonding the oxide region to a second semiconductor, e.g. silicon, substrate, and removing a portion of the first semiconductor substrate before or after implanting.
REFERENCES:
patent: 5773355 (1998-06-01), Inoue et al.
patent: 5940685 (1999-08-01), Loomis et al.
patent: 6867495 (2005-03-01), Czagas et al.
patent: 7195987 (2007-03-01), Bae et al.
patent: 2004/0014299 (2004-01-01), Moriceau et al.
patent: 2007/0176238 (2007-08-01), Seacrist
patent: 2008/0017946 (2008-01-01), Cazaux et al.
patent: 2008/0224247 (2008-09-01), Hsu et al.
Fan Xiaofeng
Lei Xinya
Mauritzson Richard A.
Aptina Imaging Corporation
Kebede Brook
LandOfFree
Method of forming substrate for use in imager devices does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of forming substrate for use in imager devices, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of forming substrate for use in imager devices will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2645993